The Center for Wireless Integrated MicroSystems (WIMS) at the University of Michigan, USA, prototyped a MEMS device consisting of 18 gas micropumps connected in series, and published the publication "MEMS2007" Summary (January 9, Sessions 9). The gas micropumps manufactured by Si MEMS technology can be widely used in the fields of environmental detectors, bioinformatics detectors, gas sensors, expiratory sensors, micro fuel cell units and the like. WIMS is now using micropumps to develop ultra-small gas chromatographs. However, due to the low flow and pressure of existing micropumps, gas chromatographic standards can not be met. Therefore, WIMS uses a series of micro-pumps in-line series, through the micro-valve and pump work to increase the pressure of the way. Pumps and valves using organic polymer parylene (Parylene) film manufacturing, the use of electrostatic force driven. WIMS trial production of two, four, 18 series pumps, and the performance of the work were measured. The maximum pressure measured were 2.5kPa, 7.0kPa, 17.5kPa, the maximum flow were 2.1sccm, 3.0sccm, 4.0sccm. 18 series pump size is 25.1mm × 19.1mm × 1mm. Power consumption is 57mW. Drive voltage is ± 100V. Drive frequency is 17kHz.
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